Micro-nanostructured interfaces fabricated by the use of inorganic block copolymer micellar monolayers as negative resist for electron-beam lithography

Glass, Roman; Arnold, Marco; Blümmel, Jacques; Küller, Alexander; Möller, Martin; Spatz, Joachim P.

Weinheim : Wiley-VCH (2003)
Journal Article

In: Advanced functional materials
Volume: 13
Issue: 7
Page(s)/Article-Nr.: 569-575

Identifier